| B | SK | PERFORMING OPERATIONS; TRANSPORTING |
| B81 | USK | MICRO-STRUCTURAL TECHNOLOGY; NANO-TECHNOLOGY [7] |
| B81 | KL | MICRO-STRUCTURAL TECHNOLOGY [7] |
| B81C | UKL | PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J 13/02; processes or apparatus peculiar to the manufacture or treatment of piezo-electric, electrostrictive or magnetostrictive elements per se H01L 41/22) [7] |
| B81C 1/00 | HGR | Manufacture or treatment of devices or systems in or on a substrate (B81C 3/00 takes precedence) [7] |
| B81C 3/00 | HGR | Assembling of devices or systems from individually processed components [7] |
| B81C 5/00 | HGR | Processes or apparatus not provided for in groups B81C 1/00 or B81C 3/00 [7] |