| B | SK | PERFORMING OPERATIONS; TRANSPORTING |
| B81 | USK | MICROSTRUCTURAL TECHNOLOGY; NANOTECHNOLOGY |
| B81 | KL | MICROSTRUCTURAL TECHNOLOGY [7] |
| B81B | UKL | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezo-electric, electrostrictive or magnetostrictive elements per seH01L 41/00) [7] |
| B81B 1/00 | HGR | Devices without movable or flexible elements, e.g. microcapillary devices [7, 2006.01] |
| B81B 3/00 | HGR | Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (B81B 5/00 takes precedence) [7, 2006.01] |
| B81B 5/00 | HGR | Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements [7, 2006.01] |
| B81B 7/00 | HGR | Microstructural systems [7, 2006.01] |
| B81B 7/02 | UGR1 | | . | containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems (MEMS) (B81B 7/04 takes precedence) [7, 2006.01] |
|
| B81B 7/04 | UGR1 | | . | Networks or arrays of similar microstructural devices [7, 2006.01] |
|