| B | SK | PERFORMING OPERATIONS; TRANSPORTING |
| B81 | USK | MICRO-STRUCTURAL TECHNOLOGY; NANO-TECHNOLOGY [7] |
| B81 | KL | MICRO-STRUCTURAL TECHNOLOGY [7] |
| B81B | UKL | MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES (piezo-electric, electrostrictive or magnetostrictive elements per se H01L 41/00) [7] |
| B81B 1/00 | HGR | Devices without movable or flexible elements, e.g. micro-capillary devices [7] |
| B81B 3/00 | HGR | Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (B81B 5/00 takes precedence) [7] |
| B81B 5/00 | HGR | Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements [7] |
| B81B 7/00 | HGR | Micro-structural systems [7] |
| B81B 7/02 | UGR1 | | . | containing distinct electrical or optical devices of particular relevance for their function, e.g. micro-electro-mechanical systems (MEMS) (B81B 7/04 takes precedence) [7] |
|
| B81B 7/04 | UGR1 | | . | Networks or arrays of similar micro-structural devices [7] |
|