| B | SK | PERFORMING OPERATIONS; TRANSPORTING |
| B81 | USK | MICROSTRUCTURAL TECHNOLOGY; NANOTECHNOLOGY |
| B81 | KL | MICROSTRUCTURAL TECHNOLOGY [7] |
| B81B | UKL | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezo-electric, electrostrictive or magnetostrictive elements per seH01L 41/00) [7] |
| B81C | UKL | PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J 13/02; processes or apparatus specially adapted for the manufacture or treatment of piezo-electric, electrostrictive or magnetostrictive elements per seH01L 41/22) [7] |