| B | SK | PERFORMING OPERATIONS; TRANSPORTING |
| B81 | USK | MICRO-STRUCTURAL TECHNOLOGY; NANO-TECHNOLOGY [7] |
| B81 | KL | MICRO-STRUCTURAL TECHNOLOGY [7] |
| B81B | UKL | MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES (piezo-electric, electrostrictive or magnetostrictive elements per se H01L 41/00) [7] |
| B81C | UKL | PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J 13/02; processes or apparatus peculiar to the manufacture or treatment of piezo-electric, electrostrictive or magnetostrictive elements per se H01L 41/22) [7] |