54 |
Titel |
TI |
[EN] MICROMECHANICAL SENSOR HAVING A BANDPASS CHARACTERISTIC |
71/73 |
Anmelder/Inhaber |
PA |
DIENEL MARCO, DE
;
MEHNER JAN, DE
;
SORGER ALEXANDER, DE
;
UNIV CHEMNITZ TECH, DE
|
72 |
Erfinder |
IN |
DIENEL MARCO, DE
;
MEHNER JAN, DE
;
SORGER ALEXANDER, DE
|
22/96 |
Anmeldedatum |
AD |
25.08.2011 |
21 |
Anmeldenummer |
AN |
201113217639 |
|
Anmeldeland |
AC |
US |
|
Veröffentlichungsdatum |
PUB |
01.03.2012 |
33 31 32 |
Priorität |
PRC PRN PRD |
EP
10401151
20100826
|
51 |
IPC-Hauptklasse |
ICM |
G01H 1/00
(2006.01)
|
51 |
IPC-Nebenklasse |
ICS |
|
|
IPC-Zusatzklasse |
ICA |
|
|
IPC-Indexklasse |
ICI |
|
|
Gemeinsame Patentklassifikation |
CPC |
G01H 13/00
|
|
MCD-Hauptklasse |
MCM |
G01H 1/00
(2006.01)
|
|
MCD-Nebenklasse |
MCS |
|
|
MCD-Zusatzklasse |
MCA |
|
57 |
Zusammenfassung |
AB |
[EN] The invention relates to a micromechanical sensor having at least two spring-mass damper oscillators. The micromechanical sensor has a first spring-mass-damper oscillating system with a first resonant frequency and a second spring-mass-damper oscillating system with a second resonant frequency which is lower than the first resonant frequency. The invention also relates to a method for detection and/or measurement of oscillations by means of a sensor such as this, and to a method for production of a micromechanical sensor such as this. The first and the second spring-mass-damper oscillating systems have electrodes which oscillate in a measurement direction about electrode rest positions with electrode deflections which are equal to or proportional to deflections of the spring-mass-damper oscillators. The systems are coupled to one another by means of at least one electrostatic field, which acts on the electrodes, forming at least one capacitance with the capacitance being governed by at least one electrode area and by at least one electrode separation and/or an electrode coverage. |
56 |
Entgegengehaltene Patentdokumente/Zitate, in Recherche ermittelt |
CT |
US000002906117A US000005775472A US000006487864B1 US020030200807A1 US020040123661A1 US020070214890A1
|
56 |
Entgegengehaltene Patentdokumente/Zitate, vom Anmelder genannt |
CT |
|
56 |
Entgegengehaltene Nichtpatentliteratur/Zitate, in Recherche ermittelt |
CTNP |
|
56 |
Entgegengehaltene Nichtpatentliteratur/Zitate, vom Anmelder genannt |
CTNP |
|
|
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Sequenzprotokoll |
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Prüfstoff-IPC |
ICP |
G01H 1/00
|