Bibliographic data

Document US020090032848A1 (Pages: 29)

Bibliographic data Document US020090032848A1 (Pages: 29)
INID Criterion Field Contents
54 Title TI [EN] SEMICONDUCTOR DEVICE AND METHOD FOR FORMING SAME
71/73 Applicant/owner PA INFINEON TECHNOLOGIES AUSTRIA, AT
72 Inventor IN ELPELT RUDOLF, DE ; RUEB MICHAEL, AT ; RUPP ROLAND, DE ; TREU MICHAEL, AT
22/96 Application date AD Jul 30, 2007
21 Application number AN 83054207
Country of application AC US
Publication date PUB Feb 5, 2009
33
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Priority data PRC
PRN
PRD


51 IPC main class ICM H01L 29/808 (2006.01)
51 IPC secondary class ICS H01L 21/266 (2006.01)
H01L 21/337 (2006.01)
IPC additional class ICA
IPC index class ICI
Cooperative patent classification CPC H01L 21/0465
H01L 29/1029
H01L 29/66068
H01L 29/66909
H01L 29/8083
MCD main class MCM H01L 29/808 (2006.01)
MCD secondary class MCS H01L 21/266 (2006.01)
H01L 21/337 (2006.01)
MCD additional class MCA
57 Abstract AB [EN] A method for manufacturing a semiconductor device. The method includes providing a semiconductor body of a conductivity type, wherein the semiconductor body comprises a first surface. At least one buried region of a second conductivity type is formed in the semiconductor body and at least a surface region of the second conductivity type is formed at the first surface of the semiconductor body, wherein the buried region and the surface region are formed such that they are spaced apart from each other. The buried region is formed by deep implantation of a first dopant of the second conductivity type.
56 Cited documents identified in the search CT US000006034385A
US000006459108B1
US000006661042B2
US020070114626A1
56 Cited documents indicated by the applicant CT
56 Cited non-patent literature identified in the search CTNP
56 Cited non-patent literature indicated by the applicant CTNP
Citing documents Determine documents
Sequence listings
Search file IPC ICP H01L 21/265
H01L 21/337
H01L 29/06
H01L 29/78
H01L 29/808