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Dokument US020060261384A1 (Seiten: 10)

Bibliografische Daten Dokument US020060261384A1 (Seiten: 10)
INID Kriterium Feld Inhalt
54 Titel TI [EN] Lateral MISFET and method for fabricating it
71/73 Anmelder/Inhaber PA RUEB MICHAEL ; SCHMITT MARKUS ; TOLKSDORF CAROLIN ; WAHL UWE ; WILLMEROTH ARMIN
72 Erfinder IN RUEB MICHAEL, AT ; SCHMITT MARKUS, DE ; TOLKSDORF CAROLIN, DE ; WAHL UWE, DE ; WILLMEROTH ARMIN, DE
22/96 Anmeldedatum AD 14.03.2006
21 Anmeldenummer AN 27678206
Anmeldeland AC US
Veröffentlichungsdatum PUB 23.11.2006
33
31
32
Priorität PRC
PRN
PRD
DE
102005012217
20050315
51 IPC-Hauptklasse ICM H01L 29/76 (2006.01)
51 IPC-Nebenklasse ICS
IPC-Zusatzklasse ICA
IPC-Indexklasse ICI
Gemeinsame Patentklassifikation CPC H01L 29/0619
H01L 29/0696
H01L 29/782
H01L 29/7825
MCD-Hauptklasse MCM H01L 29/76 (2006.01)
MCD-Nebenklasse MCS
MCD-Zusatzklasse MCA
57 Zusammenfassung AB [EN] A lateral MISFET having a semiconductor body has a doped semiconductor substrate of a first conduction type and an epitaxial layer of a second conduction type, which is complementary to the first conduction type, the epitaxial layer being provided on the semiconductor substrate. This MISFET has, on the top side of the semiconductor body, a drain, a source, and a gate electrode with gate insulator. A semiconductor zone of the first conduction type is embedded in the epitaxial layer in a manner adjoining the gate insulator, a drift zone of the second conduction type being arranged between the semiconductor zone and the drain electrode in the epitaxial layer. The drift zone has pillar-type regions which are arranged in rows and columns and whose boundary layers have a metal layer which in each case forms a Schottky contact with the material of the drift zone.
56 Entgegengehaltene Patentdokumente/Zitate,
in Recherche ermittelt
CT US000004412376A
US000004482907A
US000004831423A
US000004881979A
US000005111254A
US000005629543A
US000006194755B1
US000006326656B1
US000006707088B2
US000006787872B2
US020040222461A1
US020050082610A1
56 Entgegengehaltene Patentdokumente/Zitate,
vom Anmelder genannt
CT
56 Entgegengehaltene Nichtpatentliteratur/Zitate,
in Recherche ermittelt
CTNP
56 Entgegengehaltene Nichtpatentliteratur/Zitate,
vom Anmelder genannt
CTNP
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Sequenzprotokoll
Prüfstoff-IPC ICP H01L 29/00
H01L 29/06 E
H01L 29/78