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Abstract |
AB |
[EN] Disclosed are methods and an assembly for robust one-shot interferometry, in particular for optical coherence tomography according to the spatial domain approach (SD-OCT) and/or according to the light-field approach. In one embodiment, the method and the assembly may be used for measurements on material and living tissue, for distance measurement, for 2D or 3D measurement with a finely structured light source imaged onto the object in a diffraction-limited way, or with spots thereof. The assembly may comprise an interferometer having object and reference arms and a detector for electromagnetic radiation. In other embodiments, during a detection process, a plurality of spatial interferograms may be formed by making an inclined and/or curved reference wavefront interfere with an object wavefront for each measurement point. The resulting spatial interferograms may be detected in a single detector frame and may be further evaluated via a computer program. |
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Cited non-patent literature indicated by the applicant |
CTNP |
Emer, Wolfgang et al.: “Ultraviolet interferometry with apochromatic reflection optics” (Applied Optics, vol. 38, No. 16, 1999, pp. 3516 to 3522). 1;
Gastinger, Kay et al.: “Optical, mechanical and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS” (Proc. of SPIE, vol. 7389, 2009, pp. 73891J-1 to 73891J-12). 1;
Goodman, Joseph W.: “Holography Viewed from the Perspective of the Light Field Camera” (Proc. of Fringe 2013, 7th International Workshop on Advanced Optical Imaging and Metrology, pp. 3 to 15, Wolfgang Osten (ed.), ISBN 978-3-642-36358-0, DOI 10.1007/978-3-642-36359-7, Springer, Heidelberg, New York, Dordrecht, London 2014). 1;
Hering, Marco et al.: “Correlated speckle noise in white-light interferometry: theoretical analysis of measurement uncertainty” (Applied Optics, vol. 48, No. 3, 2009, pp. 525 to 538). 1;
Hering, Marco et al.: “One-Shot Line-Profiling White Light Interferometer with Spatial Phase Shift for Measuring Rough Surfaces” (Proc. of SPIE, vol. 6188, 2006, pp. 61880E-1 to 61880E-11). 1;
Kelsall, D.: “Optical Frequency Response Characteristics in the presence of Spherical Aberration measured by an automatically recording Interferometric Instrument” (Proc. Phys. Soc. 73, 1959, pp. 465 to 479). 1;
Malacara, Daniel: “Optical Shop Testing” (John Wiley & Sons, Inc., 1992, pp. 140 to 141). 1;
Ng, Ren et al.: “Light Field Photography with a Hand-held Plenoptic Camera” (Stanford Tech Report CTSR Feb. 2005, pp. 1 to 11). 1;
Steel, W. H.: “Interferometry” (Cambridge University Press, 1967, pp. 83 to 84). 1
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