| 54 |
Titel |
TI |
[EN] Method for examination of a surface layer |
| 71/73 |
Anmelder/Inhaber |
PA |
MICRONAS GMBH, DE
|
| 72 |
Erfinder |
IN |
BAUMANN WERNER, DE
;
EHRET RALF, DE
;
GAHLE HANS-JUERGEN, DE
;
IGEL GUENTER, DE
;
LEHMANN MIRKO, DE
;
WOLF BERNHARD, DE
|
| 22/96 |
Anmeldedatum |
AD |
01.06.2000 |
| 21 |
Anmeldenummer |
AN |
58514600 |
|
Anmeldeland |
AC |
US |
|
Veröffentlichungsdatum |
PUB |
02.12.2003 |
33
31
32 |
Priorität |
PRC
PRN
PRD |
DE
19753790
04.12.1997
|
33
31
32 |
PRC
PRN
PRD |
EP
9807597
25.11.1998
|
| 51 |
IPC-Hauptklasse |
ICM |
C12Q 1/00
|
| 51 |
IPC-Nebenklasse |
ICS |
G01N 33/543
|
|
IPC-Zusatzklasse |
ICA |
|
|
IPC-Indexklasse |
ICI |
|
|
Gemeinsame Patentklassifikation |
CPC |
G01B 11/30
G01N 21/94
H01L 22/24
|
|
MCD-Hauptklasse |
MCM |
G01N 33/543
(2006.01)
|
|
MCD-Nebenklasse |
MCS |
G01B 11/30
(2006.01)
G01N 21/17
(2006.01)
G01N 21/45
(2006.01)
G01N 21/84
(2006.01)
G01N 21/94
(2006.01)
G01N 27/414
(2006.01)
G01N 27/416
(2006.01)
G01Q 60/00
(2010.01)
H01L 21/66
(2006.01)
|
|
MCD-Zusatzklasse |
MCA |
|
| 57 |
Zusammenfassung |
AB |
[EN] In a method for examination of the surface of an object for a topographic and/or a chemical property, the object-surface is impinged with surface-structure selective biocomponents for examination of a topographic property and/or with chemoselective biocomponents for the examination of a chemical property, together with a nutrient medium and/or an osmotic protective medium for the biocomponents. The biocomponents contained in the nutrient medium and/or the osmotic protective medium are in contact with the object-surface or are spaced from the object surface by less than the detection range of the biocomponents. The object surface is then examined with the biocomponents contained in the nutrient medium and/or the osmotic protective medium by determining at least one examination measurement value. The examination measurement value is compared with a reference measurement value, and conclusions can be drawn about the topographic and/or chemical properties of the object from the result of the comparison. Using the method, an object surface can be examined for a topographic and/or chemical property in a simple manner with a high measuring sensitivity. |
| 56 |
Entgegengehaltene Patentdokumente/Zitate,
in Recherche ermittelt |
CT |
US000005031099A
US000005408312A
US000005721435A
US000005735276A
US000006033916A
US000006148096A
US000006198532B1
US000006280586B1
|
| 56 |
Entgegengehaltene Patentdokumente/Zitate,
vom Anmelder genannt |
CT |
DE000000285534A
EP000000749010A2
US000004924091A
US000005442443A
US000005510628A
US000005545531A
|
| 56 |
Entgegengehaltene Nichtpatentliteratur/Zitate,
in Recherche ermittelt |
CTNP |
|
| 56 |
Entgegengehaltene Nichtpatentliteratur/Zitate,
vom Anmelder genannt |
CTNP |
N. Streckfuss et al., "Analysis Of Trace Metals On Silicon Surfaces" Fresenius' Journal of Analytical Chemistry pp. 765-768, (1992). 1
|
|
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Prüfstoff-IPC |
ICP |
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