Bibliographic data

Document JP002007526466A (Pages: 0 )

Bibliographic data Document JP002007526466A (Pages: 0 )
INID Criterion Field Contents
54 Title TI
71/73 Applicant/owner PA
72 Inventor IN
22/96 Application date AD Mar 1, 2005
21 Application number AN 2007501193
Country of application AC JP
Publication date PUB Sep 13, 2007
33
31
32		 Priority data PRC
PRN
PRD		 DE
102004010635
Mar 2, 2004
33
31
32		 PRC
PRN
PRD		 EP
2005002128
Mar 1, 2005
51 IPC main class ICM G01N 27/414 (2006.01)
51 IPC secondary class ICS H01L 29/78 (2006.01)
IPC additional class ICA
IPC index class ICI
Cooperative patent classification CPC G01N 27/4145
G01N 33/48728
MCD main class MCM G01N 27/414 (2006.01)
MCD secondary class MCS G01N 33/487 (2006.01)
H01L 29/78 (2006.01)
MCD additional class MCA
57 Abstract AB
56 Cited documents identified in the search CT JP002002522028A
JP0000H1068712A
JP002003322633A
56 Cited documents indicated by the applicant CT
56 Cited non-patent literature identified in the search CTNP
56 Cited non-patent literature indicated by the applicant CTNP
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