| 54 |
Title |
TI |
[DE] VERFAHREN ZUR HERSTELLUNG EINES NTCR-SENSORS
[EN] METHOD OF PRODUCING AN NTCR SENSOR
[FR] PROCÉDÉ DE PRODUCTION D'UN CAPTEUR NTCR |
| 71/73 |
Applicant/owner |
PA |
VISHAY ELECTRONIC GMBH, DE
|
| 72 |
Inventor |
IN |
BRUCKNER MICHAELA, DE
;
JAROSLAW KITA, DE
;
MOOS RALF, DE
;
MÜNCH CHRISTIAN, DE
;
POULAIN VÉRONIQUE, BE
;
SCHUURMAN SOPHIE, BE
|
| 22/96 |
Application date |
AD |
May 22, 2017 |
| 21 |
Application number |
AN |
17172267 |
|
Country of application |
AC |
EP |
|
Publication date |
PUB |
Nov 28, 2018 |
33
31
32 |
Priority data |
PRC
PRN
PRD |
|
| 51 |
IPC main class |
ICM |
C23C 24/04
(2006.01)
|
| 51 |
IPC secondary class |
ICS |
H01C 7/04
(2006.01)
|
|
IPC additional class |
ICA |
|
|
IPC index class |
ICI |
|
|
Cooperative patent classification |
CPC |
C23C 24/04
C23C 24/082
H01C 7/043
|
|
MCD main class |
MCM |
C23C 24/04
(2006.01)
|
|
MCD secondary class |
MCS |
H01C 7/04
(2006.01)
|
|
MCD additional class |
MCA |
|
| 57 |
Abstract |
AB |
[EN] The present invention relates to a method of producing a negative temperature coefficient resistor (NTCR) sensor, the method comprising the steps of: providing a mixture comprising uncalcined powder and a carrier gas in an aerosol-producing unit, with the uncalcined powder comprising metal oxide components; forming an aerosol from said mixture and said carrier gas and accelerating said aerosol in a vacuum towards a substrate arranged in a deposition chamber; forming a film of the uncalcined powder of said mixture on said substrate; and transforming the film into a layer of spinel-based material by applying a heat treatment step. |
| 56 |
Cited documents identified in the search |
CT |
JP002015115438A
KR102015113392A
US020100259358A1
|
| 56 |
Cited documents indicated by the applicant |
CT |
US000007553376B2
US000008183973B2
|
| 56 |
Cited non-patent literature identified in the search |
CTNP |
SCHULZE H ET AL: "Synthesis, Phase Characterization, and Properties of Chemical Solution-Deposited Nickel Manganite Thermistor Thin Films", JOURNAL OF THE AMERICAN CERAMIC SOCIETY, vol. 92, no. 3, 16 March 2009 (2009-03-16), Blackwell Publishing, Malden, MA [US], pages 738 - 744, XP055424011, ISSN: 0002-7820, DOI: 10.1111/j.1551-2916.2009.02944.x 0
|
| 56 |
Cited non-patent literature indicated by the applicant |
CTNP |
|
|
Citing documents |
|
Determine documents
|
|
Sequence listings |
|
|
|
Search file IPC |
ICP |
C23C 24/04
H01C 7/04
|
