Bibliographic data

Document EP000001836718B1 (Pages: 7)

Bibliographic data Document EP000001836718B1 (Pages: 7)
INID Criterion Field Contents
54 Title TI [DE] MIKROPLASMAARRAY
[EN] MICROPLASMA ARRAY
[FR] RESEAU A MICROPLASMA
71/73 Applicant/owner PA FORSCHUNGSVERBUND BERLIN EV, DE
72 Inventor IN GESCHE ROLAND, DE
22/96 Application date AD Jan 11, 2006
21 Application number AN 06700748
Country of application AC EP
Publication date PUB Sep 3, 2008
33
31
32		 Priority data PRC
PRN
PRD		 DE
102005002142
Jan 12, 2005
33
31
32		 PRC
PRN
PRD		 EP
2006050157
Jan 11, 2006
51 IPC main class ICM H01J 37/32 (2006.01)
51 IPC secondary class ICS H05H 1/24 (2006.01)
IPC additional class ICA
IPC index class ICI
Cooperative patent classification CPC H01J 37/32082
H01J 37/32596
H01J 61/09
MCD main class MCM H01J 37/32 (2006.01)
MCD secondary class MCS H05H 1/24 (2006.01)
MCD additional class MCA
57 Abstract AB [EN] A microplasma array for the production of low-temperature plasmas at or near atmospheric pressures is described. The walls of holes made in a substrate at regular intervals with respect to one another form hollow electrodes and are coated with metal. The hollow electrodes are supplied individually or as a group from one side of the substrate with an electrical excitation in the GHz-region.
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