| 54 |
Title |
TI |
[DE] VERFAHREN ZUR UNTERSUCHUNG ODER ZUM STRUKTURIEREN EINER OBERFLÄCHENSCHICHT
[EN] METHOD FOR INVESTIGATING OR STRUCTURING A SURFACE LAYER
[FR] PROCEDE POUR EXAMINER OU STRUCTURER UNE COUCHE SUPERFICIELLE |
| 71/73 |
Applicant/owner |
PA |
MICRONAS GMBH, DE
|
| 72 |
Inventor |
IN |
BAUMANN WERNER, DE
;
EHRET RALF, DE
;
GAHLE HANS-JUERGEN, DE
;
IGEL GUENTER, DE
;
LEHMANN MIRKO, DE
;
WOLF BERNHARD, DE
|
| 22/96 |
Application date |
AD |
Nov 25, 1998 |
| 21 |
Application number |
AN |
98962395 |
|
Country of application |
AC |
EP |
|
Publication date |
PUB |
Jan 9, 2008 |
33
31
32 |
Priority data |
PRC
PRN
PRD |
DE
19753790
Dec 4, 1997
|
33
31
32 |
PRC
PRN
PRD |
EP
9807597
Nov 25, 1998
|
| 51 |
IPC main class |
ICM |
G01N 13/00
(2006.01)
|
| 51 |
IPC secondary class |
ICS |
G01N 21/75
(2006.01)
|
|
IPC additional class |
ICA |
|
|
IPC index class |
ICI |
|
|
Cooperative patent classification |
CPC |
G01B 11/30
G01N 21/94
H01L 22/24
|
|
MCD main class |
MCM |
G01N 33/543
(2006.01)
G01N 13/00
(2006.01)
|
|
MCD secondary class |
MCS |
G01B 11/30
(2006.01)
G01N 21/17
(2006.01)
G01N 21/45
(2006.01)
G01N 21/75
(2006.01)
G01N 21/84
(2006.01)
G01N 21/94
(2006.01)
G01N 27/414
(2006.01)
G01N 27/416
(2006.01)
G01Q 60/00
(2010.01)
H01L 21/66
(2006.01)
|
|
MCD additional class |
MCA |
|
| 57 |
Abstract |
AB |
|
| 56 |
Cited documents identified in the search |
CT |
|
| 56 |
Cited documents indicated by the applicant |
CT |
|
| 56 |
Cited non-patent literature identified in the search |
CTNP |
|
| 56 |
Cited non-patent literature indicated by the applicant |
CTNP |
|
|
Citing documents |
|
Determine documents
|
|
Sequence listings |
|
|
|
Search file IPC |
ICP |
|
