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Document DE102016216065A1 (Pages: 8)

Bibliographic data Document DE102016216065A1 (Pages: 8)
INID Criterion Field Contents
54 Title TI [DE] Feuchtigkeitsbeständige Schutzschicht
71/73 Applicant/owner PA CeramTec GmbH, 73207, Plochingen, DE
72 Inventor IN Bindig, Reiner, 95463, Bindlach, DE ; Einhellinger-Müller, Tanja, Dr., 90461, Nürnberg, DE ; Moos, Ralf, Prof.-Dr., 95447, Bayreuth, DE ; Schmidt, Tobias, 91207, Lauf, DE ; Schreiner, Hans-Jürgen, Dr., 91217, Hersbruck, DE ; Schubert, Michael, 95448, Bayreuth, DE
22/96 Application date AD Aug 26, 2016
21 Application number AN 102016216065
Country of application AC DE
Publication date PUB Mar 2, 2017
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31
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Priority data PRC
PRN
PRD
DE
102015216317
Aug 26, 2015
33
31
32
PRC
PRN
PRD
DE
102015216516
Aug 28, 2015
33
31
32
PRC
PRN
PRD
DE
102015219796
Oct 13, 2015
33
31
32
PRC
PRN
PRD
DE
102015223685
Nov 30, 2015
51 IPC main class ICM H01L 41/053 (2006.01)
51 IPC secondary class ICS C23C 24/04 (2006.01)
H01L 41/187 (2006.01)
H01L 41/23 (2013.01)
IPC additional class ICA
IPC index class ICI
Cooperative patent classification CPC H10N 30/02
H10N 30/206
H10N 30/50
H10N 30/8554
H10N 30/883
MCD main class MCM H10N 30/88 (2023.01)
MCD secondary class MCS C23C 24/04 (2006.01)
H10N 30/02 (2023.01)
H10N 30/063 (2023.01)
H10N 30/20 (2023.01)
H10N 30/50 (2023.01)
H10N 30/853 (2023.01)
MCD additional class MCA
57 Abstract AB [DE] Gegenstand der vorliegenden Erfindung ist ein piezokeramischer Vielschichtaktor mit einer feuchtigkeitsbeständigen Schutzschicht und ein Verfahren zu dessen Herstellung.
56 Cited documents identified in the search CT
56 Cited documents indicated by the applicant CT DE000003330538A1
DE000004036287C2
DE000010021919A1
JP000H07226541A
JP000H08236828A
US000004845399A
US000005281885A
US000005406164A
US020080048528A1
US020140368086A1
56 Cited non-patent literature identified in the search CTNP
56 Cited non-patent literature indicated by the applicant CTNP
Citing documents Determine documents
Sequence listings
Search file IPC ICP C23C 24/04
H01L 41/053
H01L 41/187
H01L 41/23