Bibliographic data

Document DE102016216064A1 (Pages: 6)

Bibliographic data Document DE102016216064A1 (Pages: 6)
INID Criterion Field Contents
54 Title TI [DE] Schicht und Verfahren zu seiner Herstellung
71/73 Applicant/owner PA CeramTec GmbH, 73207, Plochingen, DE
72 Inventor IN Einhellinger-Müller, Tanja, Dr., 90461, Nürnberg, DE ; Moos, Ralf, Prof.-Dr., 95447, Bayreuth, DE ; Schmidt, Tobias, 91207, Lauf, DE ; Schreiner, Hans-Jürgen, Dr., 91217, Hersbruck, DE ; Schubert, Michael, 95448, Bayreuth, DE
22/96 Application date AD Aug 26, 2016
21 Application number AN 102016216064
Country of application AC DE
Publication date PUB Mar 2, 2017
33
31
32		 Priority data PRC
PRN
PRD		 DE
102015216312
Aug 26, 2015
33
31
32		 PRC
PRN
PRD		 DE
102015221576
Nov 4, 2015
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31
32		 PRC
PRN
PRD		 DE
102016200038
Jan 5, 2016
51 IPC main class ICM H01L 41/314 (2013.01)
51 IPC secondary class ICS C23C 18/00 (2006.01)
IPC additional class ICA
IPC index class ICI
Cooperative patent classification CPC C01G 25/006
C01P 2006/40
C23C 24/04
C23C 28/32
C23C 28/345
H10N 30/045
H10N 30/074
H10N 30/079
H10N 30/708
H10N 30/8554
Y10T 29/42
MCD main class MCM H10N 30/079 (2023.01)
H10N 30/074 (2023.01)
H10N 30/097 (2023.01)
MCD secondary class MCS C23C 18/00 (2006.01)
H10N 30/00 (2023.01)
H10N 30/045 (2023.01)
H10N 30/853 (2023.01)
H10N 30/87 (2023.01)
MCD additional class MCA
57 Abstract AB [DE] Gegenstand der vorliegenden Erfindung ist eine Schicht mit piezoelektrischen Eigenschaften sowie ein Verfahren zur Herstellung einer Schicht mit piezoelektrischen Eigenschaften, insbesondere über ein Aerosolabscheideverfahren (ADM-Prozess (Aerosol Deposition Method).
56 Cited documents identified in the search CT
56 Cited documents indicated by the applicant CT
56 Cited non-patent literature identified in the search CTNP
56 Cited non-patent literature indicated by the applicant CTNP
Citing documents Determine documents
Sequence listings
Search file IPC ICP C23C 18/00
C23C 24/04
H01L 41/314