| 54 |
Title |
TI |
[DE] Verfahren zur Herstellung von Nanostrukturen |
| 71/73 |
Applicant/owner |
PA |
Leibniz-Institut für Neue Materialien gemeinnützige GmbH, 66123, Saarbrücken, DE
|
| 72 |
Inventor |
IN |
Akkan, Cagri Kaan, 66121, Saarbrücken, DE
;
Aktas, Oral Cenk, Dr., 66123, Saarbrücken, DE
;
Lee, Juseok, 66121, Saarbrücken, DE
;
May, Alexander Udo, 66386, St. Ingbert, DE
|
| 22/96 |
Application date |
AD |
Dec 5, 2012 |
| 21 |
Application number |
AN |
102012111807 |
|
Country of application |
AC |
DE |
|
Publication date |
PUB |
Jun 5, 2014 |
33
31
32 |
Priority data |
PRC
PRN
PRD |
|
| 51 |
IPC main class |
ICM |
B82B 3/00
(2006.01)
|
| 51 |
IPC secondary class |
ICS |
B82Y 30/00
(2011.01)
B82Y 40/00
(2011.01)
H01L 21/44
(2006.01)
|
|
IPC additional class |
ICA |
|
|
IPC index class |
ICI |
|
|
Cooperative patent classification |
CPC |
B81C 1/00492
B81C 2201/0116
B81C 2201/0143
B81C 2201/0149
|
|
MCD main class |
MCM |
B82B 3/00
(2006.01)
|
|
MCD secondary class |
MCS |
B82Y 30/00
(2011.01)
B82Y 40/00
(2011.01)
H01L 21/44
(2006.01)
|
|
MCD additional class |
MCA |
|
| 57 |
Abstract |
AB |
[DE] Die Erfindung betrifft ein Verfahren zur einfachen Herstellung von Nanostrukturen. Dies wird durch die strukturierte Bestrahlung eines beschichteten Substrats erreicht, welches eine Beschichtung mit einer Dicke von unter 500 nm aufweist. Durch strukturierte Bestrahlung kommt es zur Ausbildung von Nanostrukturen, welche auch von dem Substrat abgelöst werden können. |
| 56 |
Cited documents identified in the search |
CT |
DE102006023940A1
US000007655544B2
|
| 56 |
Cited documents indicated by the applicant |
CT |
|
| 56 |
Cited non-patent literature identified in the search |
CTNP |
L. Li et al.: "Laser nano-manufacturing - State of the art and challenges", CIRP Annals - Manufacturing Technology 60, pp. 735-755 (2011) p 0;
L. Longstreth-Spoor et al.: "Nanostructure and microstructure of laser-interference-induced dynamic patterning of Co on Si", J. Phys. D: Appl. Phys. 39, pp. 5149-5159 (2006) p 0;
N. Shirato et al.: "Thickness dependent self limiting 1-D tin oxide nanowire arrays by nanosecond pulsed laser irradiation", Nanoscale 3, pp. 1090-1101 (2011) p 0;
R.A. Farrell et al.: "Self-assembled templates for the generation of arrays of 1-dimensional nanostructures: From molecules to devices", Journal of Colloid and Interface Science 349, pp. 449-472 (2010) p 0
|
| 56 |
Cited non-patent literature indicated by the applicant |
CTNP |
|
|
Citing documents |
|
Determine documents
|
|
Sequence listings |
|
|
|
Search file IPC |
ICP |
B81C 1/00
B82B 3/00
B82Y 30/00
B82Y 40/00
H01L 21/283 NM
|
