| 54 |
Title |
TI |
[DE] Verfahren zur Herstellung von metallischen Strukturen |
| 71/73 |
Applicant/owner |
PA |
Leibniz-Institut für Neue Materialien gemeinnützige GmbH, 66123, Saarbrücken, DE
|
| 72 |
Inventor |
IN |
Arzt, Eduard, Prof. Dr., 66123, Saarbrücken, DE
;
Moh, Karsten, Dipl.-Phys., 66125, Saarbrücken, DE
;
Oliveira, Peter William de, Dr., 66111, Saarbrücken, DE
;
Schumacher, Sarah, 66129, Saarbrücken, DE
|
| 22/96 |
Application date |
AD |
Nov 23, 2010 |
| 21 |
Application number |
AN |
102010052032 |
|
Country of application |
AC |
DE |
|
Publication date |
PUB |
May 24, 2012 |
33
31
32 |
Priority data |
PRC
PRN
PRD |
|
| 51 |
IPC main class |
ICM |
H01L 21/768
(2006.01)
|
| 51 |
IPC secondary class |
ICS |
B81C 1/00
(2006.01)
B82B 3/00
(2006.01)
H01L 23/482
(2006.01)
H01L 23/498
(2006.01)
H05K 3/10
(2006.01)
|
|
IPC additional class |
ICA |
|
|
IPC index class |
ICI |
|
|
Cooperative patent classification |
CPC |
C23C 16/48
C23C 18/08
C23C 18/143
H01L 2924/0002
Y10T 428/24917
|
|
MCD main class |
MCM |
H01L 21/768
(2006.01)
|
|
MCD secondary class |
MCS |
B81C 1/00
(2006.01)
B82B 3/00
(2006.01)
H01L 23/482
(2006.01)
H01L 23/498
(2006.01)
H05K 3/10
(2006.01)
|
|
MCD additional class |
MCA |
|
| 57 |
Abstract |
AB |
[DE] Die Erfindung betrifft ein Verfahren zur Herstellung von metallischen Strukturen, bei dem eine Initiatorzusammensetzung umfassend photokatalytische Nanostäbe auf ein Substrat aufgebracht wird. Auf diese Schicht wird eine Vorläuferzusammensetzung, welche durch die photokatalytische Aktivität der Nanostäbe zu einem Metall reduziert wird. Durch strukturierte Belichtung können hochaufgelöste metallische Strukturen erhalten werden. |
| 56 |
Cited documents identified in the search |
CT |
US020070202334A1
US020090269510A1
|
| 56 |
Cited documents indicated by the applicant |
CT |
US000005534312A
US020040026258A1
US020050023957A1
US020060144713A1
|
| 56 |
Cited non-patent literature identified in the search |
CTNP |
Huimin, J [u.a.]: Nonaqueous sol-gel synthesis and growth mechanism of single crystalline TiO2 Nanorods with high photocatalytic activity.. In: Materials Research Bulletin, 44, 2009, S.1312 - 1316. p 0
|
| 56 |
Cited non-patent literature indicated by the applicant |
CTNP |
C.J. Brinker, G.W. Scherer: "Sol-Gel Science - The Physics and Chemistry of Sol-Gel-Processing", Academic Press, Boston, San Diego, New York, Sydney (1990) 1;
Jia, Huimin at al., Materials Research Bulletin, 2009, 44, 1312-1316, "Nonaqueous sol-gel synthesis and growth mechanism of single crystalline TiO2 nanorods with high photocatalytic activity" 1;
Noh, C.-, et al., Advances in Resist Technology and Processing XXII, Proceedings of SPIE, 2005, 5753, 879-886, "A novel patterning method of lowresistivity metals" 1;
Noh, C.-, et al., Chemistry Letters, 2005, 34(1), 82-83, "A novel patterning method of low-resistivity metals" 1
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Citing documents |
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Determine documents
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Sequence listings |
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Search file IPC |
ICP |
B81C 1/00
B82B 3/00
H01L 21/768
H01L 23/482
H05K 3/10
|
