54 |
Title |
TI |
[DE] Sequentiell umflossene Temperiereinrichtung [EN] Cooling system for semiconductors has flow passage formed to provide uniform effect |
71/73 |
Applicant/owner |
PA |
May, Stefan, 37077 Göttingen, DE
;
Wille, Stephan, 37130 Gleichen, DE
|
72 |
Inventor |
IN |
|
22/96 |
Application date |
AD |
Feb 12, 2003 |
21 |
Application number |
AN |
20302201 |
|
Country of application |
AC |
DE |
|
Publication date |
PUB |
May 28, 2003 |
33 31 32 |
Priority data |
PRC PRN PRD |
|
51 |
IPC main class |
ICM |
G06F 1/20
|
51 |
IPC secondary class |
ICS |
|
|
IPC additional class |
ICA |
|
|
IPC index class |
ICI |
|
|
Cooperative patent classification |
CPC |
H01L 23/473
H01L 2924/0002
|
|
MCD main class |
MCM |
|
|
MCD secondary class |
MCS |
H01L 23/473
(2006.01)
|
|
MCD additional class |
MCA |
|
57 |
Abstract |
AB |
[EN] The cooling element [2] is positioned within a housing [1] with a gap in between [6]. Cooling fluid is pumped around the gap with an inlet on one side [3] and an outlet [4] on the other side. A bridging section connects the parts together [5]. |
56 |
Cited documents identified in the search |
CT |
|
56 |
Cited documents indicated by the applicant |
CT |
|
56 |
Cited non-patent literature identified in the search |
CTNP |
|
56 |
Cited non-patent literature indicated by the applicant |
CTNP |
|
|
Citing documents |
|
Determine documents
|
|
Sequence listings |
|
|
|
Search file IPC |
ICP |
G06F 1/20
|