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Bibliographic data Document DE000019753790C2 (Pages: 4)
INID	Criterion	Field	Contents
54	Title	TI	[DE] Verfahren zur Untersuchung einer Oberfl�chenschicht
71/73	Applicant/owner	PA	Micronas GmbH, 79108 Freiburg, DE
72	Inventor	IN	Baumann, Werner, 79110 Freiburg, DE ; Ehret, Ralf, 79291 Merdingen, DE ; Gahle, Hans-J�rgen, Dr.-Ing., 79312 Emmendingen, DE ; Igel, G�nter, Dipl.-Ing., 79331 Teningen, DE ; Lehmann, Mirko, 79117 Freiburg, DE ; Wolf, Bernhard, Prof.Dr.rer.nat., 79252 Stegen, DE
22/96	Application date	AD	Dec 4, 1997
21	Application number	AN	19753790
	Country of application	AC	DE
	Publication date	PUB	Jul 19, 2001
33 31 32	Priority data	PRC PRN PRD	DE 19758533 19971204
51	IPC main class	ICM	G01N 33/00
51	IPC secondary class	ICS	G01N 27/327 G01N 33/483 G06T 7/00 H01L 21/66
	IPC additional class	ICA	C12Q 1/00 G01N 27/02 G01N 27/416 G01N 33/52 G01N 33/53 H01L 21/312
	IPC index class	ICI
	Cooperative patent classification	CPC	G01B 11/30 G01N 21/94 H01L 22/24
	MCD main class	MCM
	MCD secondary class	MCS	G01B 11/30 (2006.01) G01N 21/94 (2006.01) H01L 21/66 (2006.01)
	MCD additional class	MCA
57	Abstract	AB
56	Cited documents identified in the search	CT	DE000003836716A1 DE000003924454A1 DE000019512117A1 DE000019601488C1 US000004728591A US000005510628A US000005545531A
56	Cited documents indicated by the applicant	CT
56	Cited non-patent literature identified in the search	CTNP	DE-Z: Fresenius Journal Anal.Chem. (1992) 343 : 765-768 p 0
56	Cited non-patent literature indicated by the applicant	CTNP
	Citing documents		Determine documents
	Sequence listings
	Search file IPC	ICP	G01N 27/327 G01N 33/00 G01N 33/483 E G06T 7/00 H01L 21/66