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Bibliographic data Document DE000010239312B4 (Pages: 15)
INID	Criterion	Field	Contents
54	Title	TI	[DE] Verfahren zur Herstellung eines Halbleiterbauelements mit einer Driftzone und einer Feldstoppzone und Halbleiterbauelement mit einer Driftzone und einer Feldstoppzone
71/73	Applicant/owner	PA	Infineon Technologies AG, 81669 M�nchen, DE
72	Inventor	IN	R�b, Michael, Dr., Faak a. See, AT ; Strack, Helmut, Dr., 80804 M�nchen, DE
22/96	Application date	AD	Aug 27, 2002
21	Application number	AN	10239312
	Country of application	AC	DE
	Publication date	PUB	Aug 17, 2006
33 31 32	Priority data	PRC PRN PRD
51	IPC main class	ICM	H01L 21/331 (2006.01)
51	IPC secondary class	ICS	H01L 21/336 (2006.01) H01L 29/739 (2006.01) H01L 29/78 (2006.01)
	IPC additional class	ICA
	IPC index class	ICI
	Cooperative patent classification	CPC	H01L 21/26513 H01L 21/266 H01L 29/0834 H01L 29/66333 H01L 29/7395 H01L 29/861
	MCD main class	MCM	H01L 21/331 (2006.01)
	MCD secondary class	MCS	H01L 21/265 (2006.01) H01L 21/266 (2006.01) H01L 21/336 (2006.01) H01L 29/08 (2006.01) H01L 29/739 (2006.01) H01L 29/78 (2006.01) H01L 29/861 (2006.01)
	MCD additional class	MCA
57	Abstract	AB
56	Cited documents identified in the search	CT	DE000010000754A1 DE000019731495C2 US000005648283A US000006100169A WO002001020656A2
56	Cited documents indicated by the applicant	CT
56	Cited non-patent literature identified in the search	CTNP
56	Cited non-patent literature indicated by the applicant	CTNP
	Citing documents		Determine documents
	Sequence listings
	Search file IPC	ICP	H01L 21/336 H01L 29/78