DEPATISnet | Bibliographic data

Document 1/1

Bibliographic data Document DE000010129346B4 (Pages: 13)
INID	Criterion	Field	Contents
54	Title	TI	[DE] Verfahren zur Herstellung eines Halbleiterbauelementes
71/73	Applicant/owner	PA	Infineon Technologies AG, 81669 M�nchen, DE
72	Inventor	IN	R�b, Michael, Dr., Faak am See, AT
22/96	Application date	AD	Jun 19, 2001
21	Application number	AN	10129346
	Country of application	AC	DE
	Publication date	PUB	Aug 31, 2006
33 31 32	Priority data	PRC PRN PRD
51	IPC main class	ICM	H01L 21/301 (2006.01)
51	IPC secondary class	ICS	H01L 21/306 (2006.01) H01L 21/336 (2006.01)
	IPC additional class	ICA
	IPC index class	ICI
	Cooperative patent classification	CPC	H01L 21/30655 H01L 21/78 H01L 29/42368 H01L 29/781 H01L 29/7813 H01L 29/7827
	MCD main class	MCM	H01L 21/301 (2006.01)
	MCD secondary class	MCS	H01L 21/306 (2006.01) H01L 21/336 (2006.01) H01L 21/78 (2006.01) H01L 29/78 (2006.01)
	MCD additional class	MCA	H01L 21/3065 (2006.01) H01L 29/423 (2006.01)
57	Abstract	AB
56	Cited documents identified in the search	CT	DE000010062014A1 EP000000429697A1 US000004003127A US000004259682A US000004784721A US000005354695A US000005753014A US000006071819A US000006124612A
56	Cited documents indicated by the applicant	CT
56	Cited non-patent literature identified in the search	CTNP	A.Henberger, "Mikromechanik", Springer-Verlag, Berlin 1989 p 0; JP 09134893 A. In: Patent Abstracts of Japan 0; JP 9-134893 A. In: Patent Abstracts of Japan n; Stengl/Tihany, "Leistungs-MOSFET-Praxis", S. 37, Pflaum-Verlag, M�nchen 1992 p 0
56	Cited non-patent literature indicated by the applicant	CTNP
	Citing documents		Determine documents
	Sequence listings
	Search file IPC	ICP	H01L 21/301 H01L 21/306 H01L 29/78