Bibliographic data

Document DE000010100438B4 (Pages: 10)

Bibliographic data Document DE000010100438B4 (Pages: 10)
INID Criterion Field Contents
54 Title TI [DE] Verfahren zur Herstellung eines Sensorelements und Sensorelement
71/73 Applicant/owner PA Infineon Technologies AG, 81669 München, DE
72 Inventor IN Kolb, Stefan, 85716 Unterschleißheim, DE ; Rüb, Michael, Faaker See, AT ; Werner, Wolfgang, 81545 München, DE
22/96 Application date AD Jan 8, 2001
21 Application number AN 10100438
Country of application AC DE
Publication date PUB May 11, 2006
33
31
32		 Priority data PRC
PRN
PRD

51 IPC main class ICM B81C 1/00 (2006.01)
51 IPC secondary class ICS B81B 3/00 (2006.01)
G01L 9/12 (2006.01)
G01P 15/125 (2006.01)
IPC additional class ICA
IPC index class ICI
Cooperative patent classification CPC B81B 2201/0235
B81B 2201/0264
B81C 1/00047
G01L 9/0042
G01L 9/0073
G01P 15/0802
G01P 15/125
G01P 2015/0828
MCD main class MCM B81C 1/00 (2006.01)
MCD secondary class MCS B81B 3/00 (2006.01)
G01L 9/00 (2006.01)
G01L 9/12 (2006.01)
G01P 15/08 (2006.01)
G01P 15/125 (2006.01)
MCD additional class MCA
57 Abstract AB
56 Cited documents identified in the search CT DE000010003066A1
56 Cited documents indicated by the applicant CT
56 Cited non-patent literature identified in the search CTNP BOSER, B.E. et.al.: Surface Micromachined Accele- rometers. In: IEEE Journal of Solid-State Circuits, Vol. 31, No. 3, March 1996, pp. 366-375 p 0;
Burrer et al.:"High precision BESOI-based resonantaccelerometer" in Sensors and Actuators A, 1995, Vol. 50, S. 7-12 p 0;
KOVACS, G.T.A. et. a.: Micromachining of Silicon. In: Proceedings, IEEE, Vol. 86, No. 8, Aug. 1998, pp. 1536-51 p 0;
MIN, YOUNG-HOON et. al.: Modeling, design, fabri- cation an measurement .... In: Sensors and Acti- ators 78(1999), pp. 8-17 p 0;
SATO, TSUTOMU et. al.: A New Substrate Engineering for the formation of Empty Space in Silicon (ESS)... In: IEDM 99, pp. 517-520 p 0;
WEIGOLD, J.W. et.al.: Fabrication of Thick Si Re- sonators with a Frontside Release Etch-Diffusion Process. In: Journal of Microelectromechemical Systems, Vol. 7, No. 2, June 1998, pp. 201-206 p 0
56 Cited non-patent literature indicated by the applicant CTNP
Citing documents Determine documents
Sequence listings
Search file IPC ICP B81B 3/00
B81C 1/00 S
G01L 9/12
G01P 15/125