Bibliographic data

Document DE000010041921A1 (Pages: 20)

Bibliographic data Document DE000010041921A1 (Pages: 20)
INID Criterion Field Contents
54 Title TI [DE] Stoffsensor
[EN] Planar gas sensor includes electrical resistance for heating and temperature measurement which simultaneously forms condenser electrode
71/73 Applicant/owner PA Dornier GmbH, 88039 Friedrichshafen, DE
72 Inventor IN Acker, Heinrich, 73269 Hochdorf, DE ; Knezevic, Aleksandar, Dr., 73230 Kirchheim, DE ; Moos, Ralf, Dr., 88048 Friedrichshafen, DE ; Müller, Ralf, 88326 Aulendorf, DE
22/96 Application date AD Aug 25, 2000
21 Application number AN 10041921
Country of application AC DE
Publication date PUB Mar 21, 2002
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32		 Priority data PRC
PRN
PRD

51 IPC main class ICM G01N 27/22
51 IPC secondary class ICS G01R 27/26
IPC additional class ICA
IPC index class ICI
Cooperative patent classification CPC G01N 2027/222
G01N 27/226
MCD main class MCM
MCD secondary class MCS G01N 27/22 (2006.01)
MCD additional class MCA
57 Abstract AB [DE] Die Erfindung betrifft einen Stoffsensor, insbesondere Gassensor, umfassend DOLLAR A - ein Substrat oder eine Trägerschicht, DOLLAR A - eine auf dem Substrat oder der Trägerschicht aufgebrachte Kondensatorstruktur mit zwei, auf unterschiedlichem Potential liegenden Elektroden, DOLLAR A - eine Sensorfunktionsschicht in Kontakt mit der Kondensatorstruktur, DOLLAR A - einen elektrischen Widerstand zur Temperaturmessung oder Sensorheizung. DOLLAR A Erfindungsgemäß bildet der elektrische Widerstand zur Temperaturmessung oder Sensorheizung zugleich eine der Elektroden der Kondensatorstruktur.
[EN] A sensor includes an electrical resistance for heating and temperature measurement, which simultaneously forms a condenser electrode An Independent claim is included for the production of the sensor, in which a closed, or already pre-structured electrically-conductive layer is applied using thick layer technology, as a condenser precursor. This is then structured photolithographically. Preferred Features: A single electrode of the condenser structure is formed by two others. These (44, 46) interdigitate. Between the interdigitating electrodes (IEs), a resistance (42) meanders, for temperature measurement and/or heating. The resistance includes a section (40) outside the condenser IEs. One or both IEs and/or a further electrode are used for heating and/or temperature measurement.
56 Cited documents identified in the search CT DE000003911812C2
56 Cited documents indicated by the applicant CT
56 Cited non-patent literature identified in the search CTNP
56 Cited non-patent literature indicated by the applicant CTNP
Citing documents Determine documents
Sequence listings
Search file IPC ICP G01N 27/22
G01R 27/26