| 54 |
Titel |
TI |
[EN] Ejector device and method for promoting disengagement of components arranged on holding diaphragm |
| 71/73 |
Anmelder/Inhaber |
PA |
ASM ASSEMBLY SYS GMBH & CO KG
|
| 72 |
Erfinder |
IN |
STEIN ARNO
;
ZOETL STEPHANIE
|
| 22/96 |
Anmeldedatum |
AD |
11.10.2019 |
| 21 |
Anmeldenummer |
AN |
201910965139 |
|
Anmeldeland |
AC |
CN |
|
Veröffentlichungsdatum |
PUB |
24.04.2020 |
33
31
32 |
Priorität |
PRC
PRN
PRD |
DE
102018125682
20181016
|
| 51 |
IPC-Hauptklasse |
ICM |
H01L 21/687
(2006.01)
|
| 51 |
IPC-Nebenklasse |
ICS |
H01L 21/683
(2006.01)
|
|
IPC-Zusatzklasse |
ICA |
|
|
IPC-Indexklasse |
ICI |
|
|
Gemeinsame Patentklassifikation |
CPC |
F04F 5/20
F04F 5/54
H01L 21/67132
H01L 21/6838
H01L 21/68742
|
|
MCD-Hauptklasse |
MCM |
H01L 21/687
(2006.01)
|
|
MCD-Nebenklasse |
MCS |
H01L 21/683
(2006.01)
|
|
MCD-Zusatzklasse |
MCA |
|
| 57 |
Zusammenfassung |
AB |
[EN] The present invention relates to an ejector device for promoting the disengagement of a component arranged on a holding diaphragm. The device includes an ejector head having a diaphragm contact surface, wherein the diaphragm contact surface is used to abut and contact the surface, of the diaphragm, depart from a component; the ejector head further has, in the diaphragm contact surface, an ejectorport in which at least one ejector pin is movably supported; and at least one vacuum port of the vacuum section. In addition, the invention relates to a method for promoting the detachment of components arranged on the holding diaphragm by the ejector device, wherein the ejector device includes the ejector head having the diaphragm contact surface; the diaphragm contact surface is used to abut andcontact the surface, of the diaphragm, depart from a component; the ejector head further has, in the diaphragm contact surface, the ejector port in which at least one ejector pin is movably supported; and at least one vacuum port of the vacuum section; the vacuum section can generate vacuum between the diaphragm and the diaphragm contact surface through the vacuum port. |
| 56 |
Entgegengehaltene Patentdokumente/Zitate,
in Recherche ermittelt |
CT |
CN000101036221A
CN000101192008A
CN000101323152A
CN000102060193A
CN000102335985A
CN000102674699A
CN000102741997A
CN000103367136A
CN000103481646A
CN000106684014A
CN000203959326U
CN000205508797U
JP000H11145162A
JP002007053277A
JP002009073646A
JP002010161155A
KR102016068201A
US000004876791A
US020040115904A1
US020120274011A1
US020120312482A1
|
| 56 |
Entgegengehaltene Patentdokumente/Zitate,
vom Anmelder genannt |
CT |
|
| 56 |
Entgegengehaltene Nichtpatentliteratur/Zitate,
in Recherche ermittelt |
CTNP |
|
| 56 |
Entgegengehaltene Nichtpatentliteratur/Zitate,
vom Anmelder genannt |
CTNP |
|
|
Zitierende Dokumente |
|
Dokumente ermitteln
|
|
Sequenzprotokoll |
|
|
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Prüfstoff-IPC |
ICP |
|
