| 54 |
Title |
TI |
[EN] Ejector device and method for promoting disengagement of components arranged on holding diaphragm |
| 71/73 |
Applicant/owner |
PA |
ASM ASSEMBLY SYS GMBH & CO KG
|
| 72 |
Inventor |
IN |
STEIN ARNO
;
ZOETL STEPHANIE
|
| 22/96 |
Application date |
AD |
Oct 11, 2019 |
| 21 |
Application number |
AN |
201910965139 |
|
Country of application |
AC |
CN |
|
Publication date |
PUB |
Apr 24, 2020 |
33
31
32 |
Priority data |
PRC
PRN
PRD |
DE
102018125682
20181016
|
| 51 |
IPC main class |
ICM |
H01L 21/687
(2006.01)
|
| 51 |
IPC secondary class |
ICS |
H01L 21/683
(2006.01)
|
|
IPC additional class |
ICA |
|
|
IPC index class |
ICI |
|
|
Cooperative patent classification |
CPC |
F04F 5/20
F04F 5/54
H01L 21/67132
H01L 21/6838
H01L 21/68742
|
|
MCD main class |
MCM |
H01L 21/687
(2006.01)
|
|
MCD secondary class |
MCS |
H01L 21/683
(2006.01)
|
|
MCD additional class |
MCA |
|
| 57 |
Abstract |
AB |
[EN] The present invention relates to an ejector device for promoting the disengagement of a component arranged on a holding diaphragm. The device includes an ejector head having a diaphragm contact surface, wherein the diaphragm contact surface is used to abut and contact the surface, of the diaphragm, depart from a component; the ejector head further has, in the diaphragm contact surface, an ejectorport in which at least one ejector pin is movably supported; and at least one vacuum port of the vacuum section. In addition, the invention relates to a method for promoting the detachment of components arranged on the holding diaphragm by the ejector device, wherein the ejector device includes the ejector head having the diaphragm contact surface; the diaphragm contact surface is used to abut andcontact the surface, of the diaphragm, depart from a component; the ejector head further has, in the diaphragm contact surface, the ejector port in which at least one ejector pin is movably supported; and at least one vacuum port of the vacuum section; the vacuum section can generate vacuum between the diaphragm and the diaphragm contact surface through the vacuum port. |
| 56 |
Cited documents identified in the search |
CT |
CN000101036221A
CN000101192008A
CN000101323152A
CN000102060193A
CN000102335985A
CN000102674699A
CN000102741997A
CN000103367136A
CN000103481646A
CN000106684014A
CN000203959326U
CN000205508797U
JP000H11145162A
JP002007053277A
JP002009073646A
JP002010161155A
KR102016068201A
US000004876791A
US020040115904A1
US020120274011A1
US020120312482A1
|
| 56 |
Cited documents indicated by the applicant |
CT |
|
| 56 |
Cited non-patent literature identified in the search |
CTNP |
|
| 56 |
Cited non-patent literature indicated by the applicant |
CTNP |
|
|
Citing documents |
|
Determine documents
|
|
Sequence listings |
|
|
|
Search file IPC |
ICP |
|
