| 54 |
Titel |
TI |
[EN] Interferometer using tilted object waves and comprising fizeau interferometer objective |
| 71/73 |
Anmelder/Inhaber |
PA |
UNIV STUTTGART
|
| 72 |
Erfinder |
IN |
BAER GORAN
;
OSTEN WOLFGANG
;
PRUSS CHRISTOF
|
| 22/96 |
Anmeldedatum |
AD |
14.11.2016 |
| 21 |
Anmeldenummer |
AN |
201680064780 |
|
Anmeldeland |
AC |
CN |
|
Veröffentlichungsdatum |
PUB |
31.08.2018 |
33
31
32 |
Priorität |
PRC
PRN
PRD |
DE
102015222366
12.11.2015
|
33
31
32 |
PRC
PRN
PRD |
EP
2016077610
14.11.2016
|
| 51 |
IPC-Hauptklasse |
ICM |
G01B 9/02
(2006.01)
|
| 51 |
IPC-Nebenklasse |
ICS |
G01B 11/24
(2006.01)
|
|
IPC-Zusatzklasse |
ICA |
|
|
IPC-Indexklasse |
ICI |
|
|
Gemeinsame Patentklassifikation |
CPC |
G01B 2290/50
G01B 9/02007
G01B 9/02027
G01B 9/02032
G01B 9/02039
G01B 9/02057
G01M 11/005
G01M 11/0207
|
|
MCD-Hauptklasse |
MCM |
G01B 9/02
(2006.01)
|
|
MCD-Nebenklasse |
MCS |
G01B 11/24
(2006.01)
|
|
MCD-Zusatzklasse |
MCA |
|
| 57 |
Zusammenfassung |
AB |
[EN] An interferometer for areally measuring an optically smooth surface is presented, said interferometer comprising means for illuminating a surface region with a plurality of discrete object waves fromdifferent directions and comprising means which superimpose object waves reflected at the surface onto a reference wave that is coherent with a plurality of object waves on a detector in order to forman interferogram. The interferometer is distinguished by virtue of it being configured to illuminate the surface with a plurality of object waves at the same time and produce the reference wave by way of a Fizeau beam splitter plate or a Fizeau objective, and by virtue of the interferometer comprising an interferometer stop (12) that is arranged in the beam path upstream of the detector (14), andimaging optics, wherein the interferometer stop is situated within, or slightly outside of, the Fourier plane of the imaging optics and said interferometer stop filters the object waves reflected bythe surface. An independent claim is directed to a method for areally measuring an optically smooth surface. |
| 56 |
Entgegengehaltene Patentdokumente/Zitate,
in Recherche ermittelt |
CT |
CN000102589414A
CN000102607454A
CN000104685317A
DE102006057606B4
US020070019203A1
|
| 56 |
Entgegengehaltene Patentdokumente/Zitate,
vom Anmelder genannt |
CT |
|
| 56 |
Entgegengehaltene Nichtpatentliteratur/Zitate,
in Recherche ermittelt |
CTNP |
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|
| 56 |
Entgegengehaltene Nichtpatentliteratur/Zitate,
vom Anmelder genannt |
CTNP |
|
|
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|
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|
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Prüfstoff-IPC |
ICP |
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