| 54 |
Title |
TI |
[EN] Polymer layer system pressure sensor device, and polymer layer system pressure sensor method |
| 71/73 |
Applicant/owner |
PA |
BOSCH GMBH ROBERT
|
| 72 |
Inventor |
IN |
BRETTSCHNEIDER THOMAS
;
DORRER CHRISTIAN
|
| 22/96 |
Application date |
AD |
Jul 3, 2012 |
| 21 |
Application number |
AN |
201280042006 |
|
Country of application |
AC |
CN |
|
Publication date |
PUB |
Apr 30, 2014 |
33
31
32 |
Priority data |
PRC
PRN
PRD |
DE
102011081887
Aug 31, 2011
|
33
31
32 |
PRC
PRN
PRD |
EP
2012062874
Jul 3, 2012
|
| 51 |
IPC main class |
ICM |
G01L 13/02
(2006.01)
|
| 51 |
IPC secondary class |
ICS |
B01L 3/00
(2006.01)
|
|
IPC additional class |
ICA |
|
|
IPC index class |
ICI |
|
|
Cooperative patent classification |
CPC |
B01L 2200/146
B01L 2300/0663
B01L 3/502707
G01L 7/00
G01L 9/0045
G01L 9/0052
G01L 9/0072
|
|
MCD main class |
MCM |
G01L 13/02
(2006.01)
|
|
MCD secondary class |
MCS |
B01L 3/00
(2006.01)
|
|
MCD additional class |
MCA |
|
| 57 |
Abstract |
AB |
[EN] The invention relates to a polymer layer system pressure sensor device and to a polymer layer system pressure sensor method. The polymer layer system pressure sensor device comprises: a first polymer substrate (5; 5a) which comprises a first cavity (8; 8a, 8b); a first polymer membrane (4) which is stretched over the first cavity (8; 8a, 8b) and which can be deflected dependent on a pressure (PM) in the first cavity (8; 8a, 8b); a first membrane metallization layer (6; 6a) which is applied to the first polymer membrane (4) above the first cavity (8; 8a) and which can be deflected together with the first polymer membrane (4) dependent on the pressure (PM) in the first cavity (8; 8a, 8b); a second polymer substrate (3) which is arranged over the first polymer membrane (4) and which comprises a second cavity (9) that is arranged over the first cavity (8; 8a, 8b); a second polymer membrane (2) which is stretched over the second cavity (9); a second membrane metallization layer (7; 7a) that is applied to the second polymer membrane (2) within the second cavity (9); and a third polymer substrate (1) which is arranged over the second polymer membrane (2). |
| 56 |
Cited documents identified in the search |
CT |
CN000001845327A
CN000101115982A
CN000101180525A
CN000102074648A
KR102007045695A
WO002007029132A2
|
| 56 |
Cited documents indicated by the applicant |
CT |
|
| 56 |
Cited non-patent literature identified in the search |
CTNP |
|
| 56 |
Cited non-patent literature indicated by the applicant |
CTNP |
|
|
Citing documents |
|
Determine documents
|
|
Sequence listings |
|
|
|
Search file IPC |
ICP |
G01L 7/00
G01L 9/00
|
