DEPATISnet | Bibliographic data

Document 1/1

Bibliographic data Document DE000019843959A1 (Pages: 18)
INID	Criterion	Field	Contents
54	Title	TI	[DE] Verfahren zum Herstellen eines Halbleiterbauelements
71/73	Applicant/owner	PA	Siemens AG, 80333 M�nchen, DE
72	Inventor	IN	Deboy, Gerald, Dr., 82008 Unterhaching, DE ; Friza, Wolfgang, Dipl.-Ing., Villach, AT ; H�berlen, Oliver, Dr., Villach, AT ; R�b, Michael, Dr., Villach, AT ; Strack, Helmut, Dr., 80804 M�nchen, DE
22/96	Application date	AD	Sep 24, 1998
21	Application number	AN	19843959
	Country of application	AC	DE
	Publication date	PUB	Apr 6, 2000
33 31 32	Priority data	PRC PRN PRD
51	IPC main class	ICM	H01L 21/334
51	IPC secondary class	ICS	H01L 21/328
	IPC additional class	ICA
	IPC index class	ICI
	Cooperative patent classification	CPC	H01L 21/26586 H01L 29/0619 H01L 29/0623 H01L 29/0634 H01L 29/0649 H01L 29/0653 H01L 29/1095 H01L 29/41766 H01L 29/78 H01L 29/7802
	MCD main class	MCM
	MCD secondary class	MCS	H01L 21/336 (2006.01) H01L 29/06 (2006.01) H01L 29/10 (2006.01) H01L 29/78 (2006.01)
	MCD additional class	MCA	H01L 21/265 (2006.01)
57	Abstract	AB	[DE] Die Erfindung betrifft ein Verfahren zum Herstellen eines Halbleiterbauelements mit in einem Halbleiterk�rper alternierend angeordneten Halbleitergebieten (4, 5) abwechselnd unterschiedlichen Leitungstyps, die sich im Halbleiterk�rper (1) von wenigstens einer ersten Zone (6) bis in die N�he zu einer zweiten Zone (1) erstrecken und durch variable Dotierung aus Trenchen (11, 14) und deren Auff�llung eine elektrisches Feld erzeugen, das einen von beiden Zonen (6, 1) aus ansteigenden Verlauf hat. [EN] The invention relates to a method for producing a semiconductor component comprising semiconductor areas (4, 5) of different conductivity types which are alternately positioned in a semiconductor body and in said semiconductor body (1) extend at least from one first zone (6) to near a second zone (1) and by way of variable dopage from trenches (11, 14) and their fillings generate an electric field which increases from both said zones (6, 1).
56	Cited documents identified in the search	CT	DE000004309764A1 US000004754310A US000005216275A WO001997029518A1
56	Cited documents indicated by the applicant	CT
56	Cited non-patent literature identified in the search	CTNP
56	Cited non-patent literature indicated by the applicant	CTNP
	Citing documents		Determine documents
	Sequence listings
	Search file IPC	ICP	H01L 21/328 H01L 21/334 H01L 29/06 E H01L 29/78